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ADVANCED TOPICS IN ELECTRICAL ENGINEERING – ATEE 2017

Papers Proceedings »

Parametric Reduced Order Models for Static Multiphysics Design of MEMS Switches

This contribution proposes a method to extract parametric reduced models that describe the coupled structuralelectric behavior of RF MEMS switches. The equivalent capacitance coefficients and the effective elastic coefficients are extracted from coupled structural-electrostatic analysis. Parametric models are built based on the sensitivities of the extracted equivalent coefficients. The method is validated on two benchmarks: one for which experimental values are available, and the other one from the literature. The results show that, for the tested configurations, even a model of order 1 or 2 can catch accurately enough (e.g. relative error of less than 5 %) the pullin voltage of the full order model, for a variation of the investigated parameter of less than 20 %. Such a reduced parametric model is useful in early stages of the design.

Author(s):

Aurel Sorin LUP    
Politehnica University of Bucharest
Romania

Gabriela CIUPRINA    
Politehnica University of Bucharest
Romania

Daniel IOAN    
Politehnica University of Bucharest
Romania

Anton DUCA    
Politehnica University of Bucharest
Romania

Alexandra STEFANESCU    
National Institute for Research and Development in Microtechnologies, IMT Bucharest
Romania

Dan VASILACHE    
National Institute for Research and Development in Microtechnologies, IMT Bucharest
Romania

Michael KRAFT    
University of Liege
Belgium

 

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