The 9th International Symposium on ADVANCED TOPICS IN ELECTRICAL ENGINEERING 2015

Papers Proceedings »

Bending Mode Cantilever Actuators for Micro-Electromechanical Systems

This paper presents a bending-mode cantilever actuator (CA) concept for optical devices. Two designs are analyzed in stationary working conditions through numerical simulations, and their deformations under the action of electrodynamic body forces are evaluated. The modal structural analysis and the lumped, electric circuit parameters are also provided. These results may be of interest in the design stage of these CAs.

Author(s):

Alexandru Morega    
University POLITEHNICA of Bucharest, Faculty of Electrical Engineering
Romania

Nicolae Tanase    
National Institute for Electrical Engineering, ICPE-CA, Microelectromechanical Department, Bucharest,
Romania

Mihaela Morega    
University POLITEHNICA of Bucharest, Faculty of Electrical Engineering
Romania

Daniel Comeaga    
University POLITEHNICA of Bucharest, Faculty of Mechanical and Mechatronics Engineering
Romania

Cristinel Ilie    
National Institute for Electrical Engineering, ICPE-CA, Microelectromechanical Department, Bucharest,
Romania

 

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